Structure and principle
In a MEMS mirror, a metallic coil is formed on a single-crystal silicon, a mirror is formed inside the coil through MEMS processing, and a magnet is arranged beneath the mirror. Within a magnetic field generated by the magnet, electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that causes the mirror to tilt. In addition, the mirror can be driven two-dimensionally with the combination of two springs formed by MEMS processing. The path of the laser light incident on the mirror surface is varied in this way to scan and project. Compared to the electrostatic or piezoelectric driven mirrors, electromagnetically driven MEMS mirrors are lower voltage driven and easier to use.
[Figure 1] Structure diagram
The video of introduction: http://www.pentagontek.com/index.php?route=product/productfirst&path=81&productfirst_id=130
Website: https://www.hamamatsu.com/jp/en/product/optical-components/mems-mirror/index.html
| 說明 | 檔案大小 | 下載 |
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| Datasheet_S13124-01 | 123KB | |
| Datasheet_S13989-01H | 123KB | |
| Datasheet_S12237-03P | 123KB | |
| Technical information | 123KB |
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